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We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young’s modulus was able to be calculated from the measured resonant frequency. The calculated Young’s modulus was larger than the literature data . This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.
References :
1.Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto and Isao Shimoyama, “Mechanical properties of few layer graphene cantilever,”; The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2014), pp. 1087-1090, San Francisco, USA, Jan. 26-30, 2014. [Proceeding]
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