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2013-2017 MEXT KAKENHI Grant-in-Aid for Specially Promoted Research

Measurement of Biological Locomotion Using MEMS Multi-Axis Force Sensors

Three axes force sensor using piezoresistors formed on surface and side walls of silicon structure

Now constructing

References :
1.Hidetoshi Takahashi, Kiyoshi Matsumoto and Isao Shimoyama, “A piezoresistive multi axis force sensor using three dimensional doping method,”; The 15th IUMRS-International Conference in Asia (IUMRS-ICA 2014), Fukuoka, Japan, Aug. 24-30, 2014.
2.Hidetoshi Takahashi, Akihito Nakai, Nguyen Thanh-Vinh, Kiyosh Matsumoto and Isao Shimoyama, “A triaxial tactile sensor without crosstalk using pairs of piezoresistive beams with sidewall doping,” Sensors and Actuators A: Physical, vol. 199, pp. 43-48, 2013.[Paper]

東京大学大学院　情報理工学系研究科　知能機械情報学専攻　下山研究室
東京都文京区本郷7-3-1 工学部2号館8階81B
TEL:03-5841-0461 Fax:03-3818-0835

Shimoyama Lab., Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo.
7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan.